Cosmo Energy has been granted a patent for a cross-linked polymer designed for use in resists, with protected phenolic hydroxyl groups that vary solubility in developing solutions due to acid action. GlobalData’s report on Cosmo Energy gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Cosmo Energy, was a key innovation area identified from patents. Cosmo Energy's grant share as of May 2024 was 46%. Grant share is based on the ratio of number of grants to total number of patents.
The granted patent (Publication Number: US11971660B2) discloses a cross-linked polymer designed for use in resist materials that exhibit varying solubility when exposed to an acid during development. The polymer includes a structure where some phenolic hydroxyl groups are protected by a specific chemical group, as outlined in formula (1). This protection mechanism allows for controlled solubility changes in the resist material, crucial for precise patterning in semiconductor manufacturing processes.
Furthermore, the patent details various embodiments of the cross-linked polymer, including those derived from p-hydroxystyrene, 4-hydroxy phenyl(meth)acrylate, or novolac polymers obtained through condensation polymerization of phenols with aldehydes or ketones. The protection ratio of phenolic hydroxyl groups by the specified chemical group ranges from 20 to 60 mol%, ensuring the desired solubility behavior. Additionally, the polymer's weight-average molecular weight falls within the range of 5,000 to 400,000. The patent also covers a composition for a thick film resist, incorporating the cross-linked polymer, a solvent, and an acid generator, essential components for the resist formulation used in advanced semiconductor fabrication processes.
To know more about GlobalData’s detailed insights on Cosmo Energy, buy the report here.
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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.
GlobalData’s Patent Analytics tracks patent filings and grants from official offices around the world. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
